English
From the perspective of science and technology and economic development, semiconductor equipment is the basis of industrial development, and the rapid development of semiconductor industry is inseparable from the support of high-level scanning electron microscope. NavigatorSEM-100 has a unique semi-conductor direct detection technology, combined with professional intelligent analysis software, which can provide the most professional system solutions in this application field.
The 100M image scanning module of the ultra-high speed scanning electron microscope imaging system specially used for CM scale large area nano imaging in chip reverse engineering has the high-speed video recording function of 5 times TV,
It can realize the real-time observation of the device and is suitable for MEMS mechanical structure verification.